Exhibitor: KUANG YI TECHNOLOGY CO., LTD.
Date: 2025-07-18
Booth No.: M120
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❝倉敷化工累積60年的防震技術，能解決各種場地環境的複雜震動頻率，甚至是人體無法察覺的超低頻微震，皆能以獨有的技術提供最佳解決方案。❞ |
近年高科技產業對於設備精度與穩定性的要求越來越嚴苛，如何處理微震動已經是業界關注的焦點。
對於廠內的低頻微震，往往是影響精度與良率的主因，為了維持產品的最佳狀態，設備要做的不只除振，其實制振也是需要考量的重點之一。
▌除震性能&制震性能
▌主動式&被動式除震系統的作動方式及原理
主動式除震台：
- 線性馬達控制：除震台內部配置的加速規(感測器)，將目前檢測到的環境震動數據回傳至控制器，根據接收到的數據來調節內部的音圈馬達，主動產生相反方向的震動來相互抵銷，從而實現主動式控制。
- 氣壓控制：控制系統透過振動平台上的感測器檢測振動信號，計算出對應的控制信號，進而調節氣體腔室內的氣壓以產生反作用力抵消振動，從而達成主動除震效果。
被動式除震台：
- 無需外部能源輸入：透過阻尼機構及精密水平調節閥的結合，能夠迅速收斂設備的晃動。使用水平閥來偵測變位狀況，調整氣囊內部壓力以調整高度。
▌應用例
主動式除震台：
- 設備精度要求：次微米 ~ 奈米
- 半導體相關設備．FPD面板相關設備．電子束顯微鏡(TEM/SEM)．白光干涉儀相關應用
被動式除震台：
- 設備精度要求：3um以下
- 半導體相關設備．FPD面板相關設備．電子光束顯微鏡．高倍率影像檢測．高精密測量設備
▌除震性能比較 (主動式與被動式除震系統的震動傳達率)
如下圖示意，被動式的除振效果(藍線)於5Hz前就降到０dB以下代表在極低頻區域就有除震效果，主動式除震系統採用FF、FB控制，可於全頻域（0Hz 起）發揮優異除震效能，適用於高精密製程中極低頻震動的處理需求。
[延伸閱讀]：為精密設備/儀器解決微震動問題 - Part 2 模擬報告事前評估
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