"Stability Monitoring of Wafer Vibration Levels in VibRec"
Category: Smart Manufacturing
Exhibitor: TRANZX ADVANCED TECHNOLOGY CO., LTD.
Booth No: Q1108
Characteristic
Using VibRec wafer transfer measurement system from Creative Advanced Technology, it is possible to effectively monitor whether wafers are correctly and steadily transferred into cassettes or FOUPs. By utilizing three-axis XYZ vibration measurements and horizontal measurement data, it allows real-time detection of any abnormal collision occurrences during wafer transfer.
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