傅立葉掃描顯微鏡-大範圍奈米結構非接觸型量測解決方案
Model: 傅立葉掃描顯微鏡
Category: Smart Manufacturing
Exhibitor: TITAN ELECTRO-OPTICS CO., LTD.
Booth No: J1028
Characteristic
高速掃描與非接觸式的量測技術，相較於SEM(破片量測)與AFM(探針掃描量測)都非真正的非接觸量測，不僅提供單奈米級的量測準確度，適合應用在光學與電子產業的結構量測需求上。
量測技術上，主要透過準直光束有效的入射到結構表面產生散射狀況，擷取散射角度不同的繞射光，可以計算出真實結構的立體樣貌，主力為量測光柵或透鏡陣列等等的穿透型元件表面結構，也是能夠有效取代白光干涉儀的光學度量新技術。
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