Granite-Based Air Bearing Platform

 

Model: 製程設備半導體氣浮平台

Category: Machine Tool & Machinery

Exhibitor: SKEYE MACHINERY CO., LTD.

Booth No: Q018

 

 

Characteristic

 

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Frictionless Support via Air Bearing Layer
A thin air film (air bearing layer) is formed between the platform and the supporting surface by high-pressure clean gas, causing the platform to levitate on the air film. This eliminates direct contact between solid surfaces, reducing frictional resistance to near zero and enabling smooth, low-friction motion.

Precision Gas Pressure Control System
Using flow valves and pressure sensors, the gas pressure within the air bearing layer is monitored and adjusted in real time. This ensures the platform maintains a stable levitation height and uniform air film thickness under varying loads and operating conditions, preventing platform oscillation or instability caused by pressure fluctuations.

Micro-Vibration Suppression and Rigid Structural Design
Active or passive vibration damping technologies (such as magnetic bearings or fluid dampers) combined with a highly rigid platform structure effectively isolate external vibration disturbances. This reduces vibration amplitude and enhances platform positioning accuracy and motion stability.

 

 

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