Vacuum Motors
Category: Key Components
Exhibitor: HIWIN MIKROSYSTEM CORP.
Booth No: J518
Characteristic
HIWINMIKRO Full Series of Vacuum Motors: Based on years of cooperation with high-end semiconductor manufacturers, HIWIN has launched vacuum linear motors and vacuum direct drive motor series to provide customers with the best solutions for vacuum applications. The entire range offers powerful performance and meets the most stringent vacuum requirements. Application examples : Wafer grinding, Centrifugal cleaning, Centrifugal drying, PVD, CVD, Nanoscale wafer inspection, etc.
Other Products
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Linear motor stages-Standard Single Axis
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Controller & Drive
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Linear Motor
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Direct Drive Motor
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Torque Motor
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Spindle Motor
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