Intelligent automatic optical 3D white light interference/conjugate focus measurement Surface scan

Model: C046

Booth No: J1008

Characteristic

SE-5AT Semiconductor Series
White light interferometer is a non-contact 3D microscopic surface measurement device that uses interference and confocal technology to achieve nano-level measurement.

White light interferometry｜Line Laser Projection｜AI multi-focus superposition

→ Multifunctional measurement function
It can also meet the needs of microscopic inspection and three-dimensional measurement of the surface of objects, and can perform more multifunctional inspections at the nano level, such as roughness measurement, film thickness measurement, 3D profile analysis, and microstructure analysis.

→ Exclusive algorithm
Through special algorithms, faster and more accurate detection results are achieved. The performance, function, efficiency and design are superior to the existing 3D profilers on the market. Positioning marks can be set, measurement targets can be set, and reports can be automatically produced.

→ Optical technology
Multi-band LED light sources have better versatility, while laser confocal has a more fixed wavelength. The LED illumination area is more evenly illuminated, and the speed is faster than laser scanning, which can avoid interference patterns and scattering problems.

→ Measurement Applications
It is suitable for wafer accumulation (silicon wafer, sapphire, SIC, GAN, etc.) semiconductor wafer surface profile inspection, component type LCD, LED, Micro lens, MEMS and other micro-structure surface shape parameter measurement.

BUENOOPTICS's customized UI is similar to the original public program interface, which reduces the learning curve and makes it easy to get started.