Intelligent automatic optical 3D line conjugate focus measurement line scan

Model: C082

Booth No: J1008

Characteristic

SE-5AT Semiconductor Series
Line conjugate focus is a non-contact 3D fine surface measurement equipment that adopts line scanning and confocal technology to achieve rapid micron-level measurement.

Advantages and features of intelligent automatic optical 3D line conjugate focus measurement equipment
→ At the same time, it meets the requirements of high-speed and micron-level height difference measurement.
→ Can be used with the point cloud AI deep learning system to interpret point cloud information.
→ Can be used with white light interference microscopy system for re-judgement and random inspection of nanometer-level measurements.
→ Can measure absorptive or colored materials, diffusive and reflective materials.
→ Measurement can be performed on both rough and polished material surfaces.

➤ Applicable to
Wafer type (silicon wafer, sapphire, SIC, GAN, etc.) semiconductor wafer surface profile inspection, component type (LED, LED, Micro lens, MEMS, etc.) microstructure surface shape parameter measurement.
PCB (carrier board (ABF), precision welding, solder ball) microstructure surface shape parameter measurement.

➤ Measurement items
Measurement of microstructure surface parameters such as 2D/3D surface profile, step difference, and warpage.