-BUENO OPTICS CO., LTD.-Taiwan Automation Intelligence and Robot Show 2025

Model: C028

Booth No: J1008

Characteristic

SE-5AT Semiconductor Serie
Intelligent optical wafer/chip surface defect and height detection equipment
https://www.buenooptics.com/en/5at2

→ Measurement technology
Provides precise optical inspection and analysis of defects generated during the semiconductor wafer manufacturing process, using an auto-focus microscope module with an XYZ three-axis displacement platform (integrated optical ruler) to perform flying photography to capture wafer/chip surface images.

→ Exclusive algorithm
Image comparison and AI image deep learning can be performed based on the defects to be detected to reduce the occurrence of overkill and underkill.

→ Optical technology
Customizable tolerances can be used to automatically sort OK/NG parts. The defect area, defect quantity, and defect location can be calculated and marked. Automation can also be integrated to improve inspection efficiency.

→ Measurement Applications
It can be used with a white light confocal module to measure the height variation of wafers/chips. This module has the advantages of high precision, high speed measurement and is not affected by materials. The height measurement results are represented by a color distribution diagram, and the image is intuitive. It can also perform non-contact thickness measurement, including THK/TTV/WARP/BOW.

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